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Applications Example

DBG Die Strength-2
By employing dry etching as a stress relief process after the DBG process, it is possible to further increase the die strength.

<Process Example>

Dry etching is a stress relief method that uses gas.
By dry etching the die after the DBG process, it is possible to greatly increase the die strength by the removal of the damage layer from the top surface and side surface of the die.
Figure 1　Die strength using ball measurement

Photo 1　Before stress relief
Photo 2　After stress relief





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